Micro Structures & Sensors Lab
Kenny Group @ Stanford
The Micro Structures and Sensors Laboratory at Stanford University is directed by Professor Thomas Kenny of the Mechanical Engineering Department. Our group's research in the area of MicroElectroMechanical Systems (MEMS) leverages silicon microfabrication techniques to create micro-devices that include ultra-stable timing references and high performance sensors. Recent work encompasses the design, optimization, and effective realization of high performance MEMS devices, as well as the integration of various types of sensors.

Lab News

Nicholas Bousse
  2:37pm Jun 14, 2022
Congratulations to Chris for his excellent defense!
James Miller
  7:20am Sep 26, 2021
Congratulations to Gabrielle for her excellent defense!!!
James Miller
  9:39am Jun 3, 2020
Congratulations to Ryan for his excellent defense!!!